Cleanroom (HHS 2034)
A 1600 ft2 class 10000 cleanroom with approximately 350 ft2 class 1000 lithography room.
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- Raith Elphy+ advanced electron beam lithography tool
- Quintel Expo 4K6 mask aligner with IR backside alignment
- Edwards Auto 500 DC/RF Magnetron sputter deposition system
- Edwards Auto 306 thermal evaporator
- March Instruments PX-250 plasma etcher
- MBraun electron beam evaporator system
- 2 Lindberg Blue-M 6” tube furnaces for oxidation / annealing
- Tencor Alpha Step stylus profilometer
- Nima Technologies Dip Coater
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Product Realization Lab (HHS 0001)
Machining services are available for manufacturing of assembly parts where tight tolerances on dimensions and metal finishes are required. The removal of material from a work piece is performed using conventional equipment for drilling, milling, and turning. (Our machine shop has limited prototype capabilities in four to five axis, with a circular capacity of 17 inches diameter x 6 feet long, and a mill capacity of 40 inches.)
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- 3-D Laser Scanning Capability
- NextEngine Desktop 3D Scanner Model 2020i
- Rapid Prototyping Capability
- Selective Laser Sintering: 3DSystems 2500+ SLS machine
- 3-D Ink0Jet Printing: zCorp zPrinter 450 3DP machine
- Fused Deposition Modeling: Stratays Dimension sst 1200 FDM machine
- Injection Molding Capability
- Two Milicron-Fanuc injection molding machines:
- 7-ton table-top machine with 3-inch platens
- 110-ton commercial machine with 12-inch platens
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